Vacuum Pumps

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Rotary Vacuum Pump G-100D

G-100D pump.jpeg

This rotary pump is located in the Ulvac DLMS-531 Helium leak detector (Blue leak detector). It gets to around 4 mTorr in 2 minutes with a blank and not other vacuum equipment attached. Tested on Jan 10/2017, by keeping 4 mTorr during 30minutes.

Precaution: A sudden stop of the pump may contaminate the vacuum space. Due to, the inlet side of the pump is at negative pressure (-14.7 PSI) and the exhaust is at atmospheric pressure. The atmospheric pressure on the exhaust side of the pump will try and get into where the negative pressure. The oil in the pump is between the inlet and the exhaust. Then, oil molecules will go in to the vacuum space. Therefore, in order to avoid the contamination, bring the system to atmospheric pressure before turning off pump, you may use a valve in the system to vent the pump inlet to atmospheric pressure before stopping pump.

The manual of operation is here.

Pfeiffer Rotary Vane Pump UNO/DUO 004B

UNO-DUO004B pump.jpeg

It is located in the Helium leak detector HLT 100.

It can go down to 3 mTorr in 3 minutes using just a blank in the vacuum port. However, it slowly starts to increase the pressure after some time working. For example, after 30 minutes the pressure was around 7 mTorr.

Tested on Jan 11/2017.

The manual The manual of operation is here.

Agilent Varian Diaphragm pump Type 949-9401

The manual of operation is here.